JPS6143039Y2 - - Google Patents
Info
- Publication number
- JPS6143039Y2 JPS6143039Y2 JP12827980U JP12827980U JPS6143039Y2 JP S6143039 Y2 JPS6143039 Y2 JP S6143039Y2 JP 12827980 U JP12827980 U JP 12827980U JP 12827980 U JP12827980 U JP 12827980U JP S6143039 Y2 JPS6143039 Y2 JP S6143039Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- container body
- pipe
- container
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 63
- 238000001514 detection method Methods 0.000 claims description 21
- 230000008016 vaporization Effects 0.000 claims description 11
- 238000009834 vaporization Methods 0.000 claims description 10
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12827980U JPS6143039Y2 (en]) | 1980-09-08 | 1980-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12827980U JPS6143039Y2 (en]) | 1980-09-08 | 1980-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5750000U JPS5750000U (en]) | 1982-03-20 |
| JPS6143039Y2 true JPS6143039Y2 (en]) | 1986-12-05 |
Family
ID=29488669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12827980U Expired JPS6143039Y2 (en]) | 1980-09-08 | 1980-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143039Y2 (en]) |
-
1980
- 1980-09-08 JP JP12827980U patent/JPS6143039Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5750000U (en]) | 1982-03-20 |
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